Effect of laser fluence on the optoelectronic properties of nanostructured gan/porous silicon prepared by pulsed laser deposition

Effect of laser fluence on the optoelectronic properties of nanostructured gan/porous silicon prepared by pulsed laser deposition

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ABSTRACT In this study, the fabrication of nanostructured GaN/porous Si by pulsed laser deposition (PLD) was demonstrated. The porous silicon was prepared using laser-assisted


electrochemical etching (LAECE). The structural, optical, and electrical properties of GaN films were investigated as a function of laser fluence. XRD studies revealed that the GaN films


deposited on porous silicon were nanocrystalline, exhibiting a hexagonal wurtzite structure along the (100) plane. Spectroscopic property results revealed that the photoluminescence PL


emission peaks of the gallium nitride over porous silicon (GaN/PSi) sample prepared at 795 mJ/mm2 were centered at 260 nm and 624 nm. According to topographical and morphological analyses,


the deposited film consisted of spherical grains with an average diameter of 178.8 nm and a surface roughness of 50.61 nm. The surface of the prepared films exhibited a cauliflower-like


morphology. The main figures of merit of the nanostructured GaN/P-Si photodetectors were studied in the spectral range of 350–850 nm. The responsivity, detectivity, and external quantum


efficiency of the photodetector at 575 nm under − 3 V were 19.86 A/W, 8.9 × 1012 Jones, and 50.89%, respectively. Furthermore, the photodetector prepared at a laser fluence of 795 mJ/mm2


demonstrates a switching characteristic, where the rise time and fall time are measured to be 363 and 711 μs, respectively. SIMILAR CONTENT BEING VIEWED BY OTHERS PREPARATION OF GAN/POROUS


SILICON HETEROJUNCTION PHOTODETECTOR BY LASER DEPOSITION TECHNIQUE Article Open access 07 September 2023 ENHANCING SIGESN NANOCRYSTALS SWIR PHOTOSENSING BY HIGH PASSIVATION IN


NANOCRYSTALLINE HFO2 MATRIX Article Open access 12 February 2024 PREPARATION OF NOVEL B4C NANOSTRUCTURE/SI PHOTODETECTORS BY LASER ABLATION IN LIQUID Article Open access 03 October 2022


INTRODUCTION The category of semiconductor materials known as III-nitrides has gained popularity in recent years due to their wide and direct band gaps, as well as their capacity to create


alloys like InGaN and AlGaN1,2,3. By adjusting the composition of these alloys, the band gap can be modified across the entire solar spectrum, from deep UV to IR4,5,6,7. GaN (gallium


nitride), in particular, possesses a broad band gap of 3.4 eV and a wurtzite hexagonal structure, which results in minimal leakage currents and enables the operation of optoelectronic


devices at elevated temperatures and frequencies8,9,10,11. GaN proves advantageous for optoelectronic applications, such as photodiodes, which find utility in diverse detection, monitoring,


and control scenarios12,13,14,15. Furthermore, these photodiodes hold great promise for advanced uses, including military, medical, display, general illumination, and environmental


monitoring applications16,17,18,19,20. Its distinctive characteristics also render GaN suitable for deployment in LEDs, solar cells, and photodetectors21,22,23,24. Several techniques,


including pulsed laser deposition, chemical vapor deposition, and molecular beam epitaxy, have demonstrated successful outcomes in producing GaN thin films. These methods share a common


objective: the fabrication of high-performance P-N and P-I-N heterojunctions within GaN films of varying thicknesses and on diverse substrates. These aspects encompass efficiency, speed,


responsivity, and minimal dark current24,25,26,27,28,29. Notably, the pulsed laser deposition method presents a straightforward protocol, generating a substantial, well-directed material


plume30,31,32,33. Additionally, it offers meticulous control over growth rate and is well-suited for generating thin films with strong adhesion on cost-effective substrates. Furthermore,


this technique enables precise regulation of thin film properties, encompassing thickness and structure34,35,36. n contemporary semiconductor manufacturing, silicon (Si) is extensively


employed due to its cost-effectiveness and compatibility with various processes. However, silicon's applicability in the infrared spectrum is limited due to its heightened reflectance


and wide band gap37,38,39. These constraints have been significantly alleviated with the advancement of porous silicon (P-Si) technology40. P-Si enhances surface area, rendering it a


suitable substrate for optoelectronic devices41. Furthermore, porous silicon (P-Si) exhibits favorable characteristics like robust room-temperature photoluminescence (PL), elevated chemical


reactivity, rapid oxidation, affordability, and a quantum confinement effect that enhances radiative transitions42,43,44,45,46. As a result, P-Si finds utility in the fabrication of various


optoelectronic devices, encompassing photodiodes, LEDs, detectors, and even biosensors47,48,49. Deposition of a film on porous silicon for photodetection applications was reported50. This


offers the advantages of a large sensitive surface area, the formation of two junctions connected in series, increased responsivity of the porous photodetector, and improved speed of


response of the photodetector. Herein, a new device has been fabricated make use the advantages of two differnt teqniques photonic cysrtal substrate and nanofilm active layer. The


fabrication of a high-performance GaN/PSi photodetector via the pulsed laser deposition method under various laser fluences has been reported. EXPERIMENTAL WORKS PREPARATION OF POROUS


SILICON SUBSTRATES Mirror-like n-type (110) Si wafers with an electrical resistivity of 1–5 mΩ/cm and a thickness of 500 μm, which were purchased from University Wafer, Inc., USA, were


utilized. Subsequently, the wafers were sectioned into rectangular pieces, each measuring 1 by 1 cm. Before initiating the photo-electrochemical etching process, the sections underwent a


thorough cleaning using an ultrasonic device in ethanol (99.9% concentration, sourced from the German Honeywell company) for a duration of 5 min. The etching process was carried out at room


temperature and involved the utilization of a diode laser (660 nm, 100 mW, from the Chinese Tongtool Company), a DC power supply with a voltage range of 0–30 V, and a digital multi-meter


(Victor Company). This process, as depicted in Fig. 1, requires the use of a Teflon cell equipped with a cathode electrode made of 95% pure platinum and an anode electrode composed of


silicon. The laser played a pivotal role in the top-down electrochemical etching technique employed for the synthesis of the porous silicon (PSi) substrates. Additionally, precise control


was maintained over the etching conditions, with a designated etching time of 10 min, a consistently upheld current density of 10 mA/cm2, and a constant concentration of hydrofluoric acid


(HF) (sourced from the German company Thomas Baker) at 24%, achieved through the use of the dilution equation51, as depicted in Eq. (1). The concentration of HF used in the etching process


was consistently maintained at 24%, and the etching time was precisely set using a digital clock for a duration of 10 min52,53,54,55,56 $$ {\text{C}}_{1} {\text{V}}_{1} = {\text{C}}_{2}


{\text{V}}_{2} $$ (1) where C1, hydrofluoric acid concentration; V1, hydrofluoric acid volume; C2, ethanol concentration. V2, ethanol volume. Upon completion of the LAECE process, all


synthesized P-Si substrates undergo a series of tests to identify the optimal outcome for varying current densities58,59,60. Structural properties were examined using X-ray diffraction (XRD)


equipment (XRD6000 Shimadzu Company) from Japan, utilizing copper radiation with a wavelength of 1.54060 Å. Morphological parameters were evaluated at a high level of detail using German


field emission scanning electron microscopy (FESEM) technology (ZEISS Company). Surface characteristics were assessed using atomic force microscopy (AFM) equipment from the TT-2 Workshop


Company in the United States. Spectroscopic features were analyzed using photoluminescence (PL) techniques from the Perkin Elmer Company in the United States of America. PREPARATION OF


GALLIUM NITRIDE PELLET A high-purity gallium nitride powder of 99.9%, purchased from Luoyang Advanced Material Company, was compressed into a pellet using a hydraulic compressor with a force


of 10 tons. The GaN pellet was subjected to ablation using a Q-switching Nd:YAG laser (RY 280, China) with varying fluences ranging from 530 to 884 mJ/mm2. The laser had a wavelength of 355


 nm and a pulse duration of 7 ns, and the ablation process was conducted under a vacuum pressure of 10–2 mbar. The deposition of the GaN film onto the PSi substrate occurred at room


temperature. The structure of the GaN film deposited on PSi was examined using an X-ray diffractometer (XRD6000, Shimadzu Company). The morphology of the deposited films was studied using


field emission scanning electron microscopy (FESEM) from ZEISS Company. The topography of the deposited films was investigated using an atomic force microscope. Furthermore, the


photoluminescence (PL) properties of the films were analyzed using a spectrophotometer from Perkin Elmer. ELECTRICAL PROPERTIES OF GAN/PSI To measure the electrical properties of the GaN/PSi


photodetector, a metal interdigitated mask was employed for establishing ohmic contacts. An aluminum film was deposited onto the GaN layer and the backside of the silicon substrate using


the thermal evaporation technique, as depicted in Fig. 2. The current–voltage characteristics of the photodetector were measured at room temperature under both dark and illuminated


conditions. This was achieved using a power supply (Dazheng 30 V, 5 A PS-305D from China) and digital multi-meters (UNI-T UT33C). Additionally, a programmable LCR meter (LCR-6100, Taiwan, GW


Instek, 10 Hz–100 kHz) was employed to evaluate the capacitance–voltage characteristics of the photodetector. FIGURES OF MERIT OF THE PHOTODETECTOR The main figures of merit of the


photodetector, namely responsivity (R), specific detectivity (D*), and external quantum efficiency (EQE) were measured using photodetector evaluation system. It is consists of monochromator


(Jobin-Yuvon), beam spilter, halogen lamp, multimeter, and silicon power meter. These measurements were conducted out under a reverse bias of 3 V. RESULTS AND DISCUSSION XRD PROPERTIES


Figure 3 depicts the XRD pattern of the PSi, revealing two peaks situated at 2θ = 33° and 68°, which correspond to the (200) and (400) planes, respectively. These two peaks are


characteristic of porous silicon and align well with findings reported previously61,62,63,64,65,66. The XRD analysis of PSi confirms the splitting of the peak at 68° into two distinct peaks,


representing crystalline silicon and porous silicon.. Figure 4 depicts the XRD pattern of GaN nanocrystalline films deposited on PSi at various laser fluences. Three peaks were observed for


all GaN films; these peaks are located at 2θ = 32.8°, 57.9°, and 61.7°, corresponding to (100), (110), and (103) planes, respectively. These peaks are indexed to GaN according to JCPDS #


01-074-0243. With an increase in laser fluence, a slight shift in 2θ was detected, and there was an observed increase in peak intensity along the (100) plane. The slight shift is attributed


to stress and strain, while the increase in peak intensity is attributed to the greater film thickness and grain size. The XRD analysis of the PSi substrate and the GaN films deposited on


PSi is presented in Tables 1 and 2, respectively. To determine the crystallite size (D), Scherrer’s formula67,68,69,70 was employed, while the interplanar distance (d) was calculated using


the formula71,72,73,74 $$ {\text{D}} = {{{\text K}\lambda }}/{\upbeta }\cos {{ \uptheta }} $$ (2) $$ {\text{d}} = {{{\text n}\lambda }}/2{ }\sin {\uptheta } $$ (3) where K is a constant set


at 0.9, λ is the wavelength of the CuKα source, β is the fullwidth at half maximum of the XRD pattern,\(\uptheta \) is the diffraction angle, and n is a positive integer. SPECTROSCOPIC


PROPERTIES The photoluminescence (PL) spectra of the PSi substrate are depicted in Fig. 5. PL measurements of the PSi substrate were conducted at room temperature with an excitation


wavelength of 280 nm. Firstly, it is observed that the prepared PSi substrate exhibits an emission peak at 589 nm, which belongs to the visible yellow band. This peak is attributed to


surface states and quantum confinement arising during the photo-electrochemical etching process, as mentioned by Wang75,76,77,78. The energy band gap of the prepared PSi substrate was


determined to be 2.1 eV, larger than the energy band gap of crystalline silicon (1.11 eV). This difference in energy band gaps can be attributed to the combined effects of quantum


confinement and increased surface states, altering the electronic structure of the material. The PL spectra of GaN nanocrystalline films prepared at different laser fluences are depicted in


Fig. 6. The PL of GaN/P-Si nanocrystalline films was measured at room temperature, and the excitation wavelength was 320 nm. The PL spectra of the GaN nanocrystalline films exhibited UV


bands located at 265.9, 267.9, 267, 260, and 260.9 nm, which are attributed to the GaN film, as well as red bands at 628.9, 621, 625.9, 624, and 625 nm, which belong to the P-Si substrate.


Increasing the laser fluence led to a decrease in the PL intensity, but there were differing opinions regarding the peak location of the PL spectrum. This discrepancy was likely due to the


higher defect density causing more non-radiative recombination. According to the PL results, the energy gaps for GaN nanofilms prepared at laser fluences of 530, 618, 707, 884, and 795 


mJ/mm2 are 3.45, 3.38, 3.36, 3.34, and 3.44 eV, respectively, which are in agreement with the reported data58,79,80,81. SURFACE TOPOGRAPHY AFM Figure 7 a,b depicts the 3D AFM images and the


grain size distribution of P-Si substrate etched. In contrast, after 10 min of etching, the pores formed uniformly throughout the entire surface, taking on a more elongated oval shape. Table


3 provides the AFM parameters of a prepared P-Si substrate. Most notably, nanometer-scale research into particle size distribution was conducted on the P-Si substrate after preparation. To


analyze and characterize the topography of the prepared GaN nano-crystalline films over a PSi substrate, Fig. 8 depicts three-dimensional AFM images and grain size distribution. Average


particle diameter and average surface roughness increased as laser Fluence increased from 530 to 884 mJ/mm2, but they decreased at 884 mJ/mm2, as demonstrated in Table 4. The AFM image of


the GaN nanocrystalline film shows the uniform deposition of samples created with 795 mJ/mm2 laser Fluence and the largest average particle diameter and average surface roughness. SURFACE


MORPHOLOGY FESEM Figure 9a and b depicts FE-SEM images of the surface and cross-section, respectively, of the PSi substrates, offering insights into the surface morphology. According to the


research conducted by Omar et al.67, the pores on the surface exhibit a star-like appearance and maintain an elongated shape across the entire surface. This is attributed to the use of


n-type silicon (100) with low resistivity during the preparation of the PSi82,83,84,85. Furthermore, the FE-SEM cross-sectional image revealed that the thickness of the P-Si layer measures


36.02 μm. Figure 10 depicts FE-SEM images of GaN/PSi nanostructures produced using PLD at varying laser intensities. This study revealed that the thickness of the GaN nanocrystalline film


produced with a laser fluence of 795 mJ/mm2 during the PLD process measures approximately 383.36 nm, which is comparable to the thickness of the GaN nanostructures themselves. The surface


morphology of the GaN films was analyzed using micro- and nano-scale techniques. As depicted in Fig. 11, the average diameter of GaN/PSi nanostructures created with different laser fluences


was calculated through ImageJ analysis. Furthermore, the GaN nano-crystalline films fully covered the P-Si substrate, resulting in uniform and homogeneously-sized spherical particles with a


cauliflower-like shape. ELECTRICAL PROPERTIES At room temperature, the dark current–voltage characteristic of the prepared P-Si substrate was analyzed in the dark, as depicted in Fig. 12A.


As the voltage was applied, the current flowing through the P-Si substrate increased due to the elevated resistance of the P-Si layer with increasing voltage86,87. Moreover, the charge


transfer led to the formation of a depletion zone in the prepared P-Si substrate close to the electrical dipole, resulting in a rectifying characteristic88,89,90. Figure 12B depicts the


capacitance–voltage characteristic for applied voltages ranging from 0 to 3 V. The capacitance of the prepared P-Si substrate decreased. This phenomenon has been coined as the “growing


depletion region with increasing built-in potential”57,91,92,93,94.was coined to describe this phenomenon. The relationship between 1/C2 and the voltage on the fabricated P-Si substrate is


depicted in Fig. 12C. C2 exhibits a linear relationship with voltage. Figure 12C shows the correlation between 1/C2 and voltage on a prepared PSi substrate. a linear relationship with


voltage. The built-in potential was determined by extending the given linear segment of the curve to a 1/C2 value of 0 points. There was an inherent potential of 0.34 eV. Figure 13 depicts


the dark I–V characteristics of GaN nanocrystalline films fabricated on a P-Si substrate using the PLD method at various laser fluences and at room temperature. As the bias voltage was


increased, the GaN nano-crystalline film created at 795 mJ/mm2 exhibited expansion due to the narrowing of the depletion layer95,96. Furthermore, rectification features were observed in the


GaN/P-Si nanocrystalline film, and recombination tunneling served as the current transport mechanism in both layers97,98,99. PERFORMANCE CHARACTERIZATION OF GAN NANOSTRUCTURE WITH OPTIMUM


LASER FLUENCE The performance properties of the fabricated GaN/PSi heterojunction using the PLD method with optimal laser parameters (355 nm laser wavelength and 300 °C substrate


temperature) at different laser fluences were determined, and they are illustrated in Figs. 15, 16, 17 and 18. The study concluded that a laser Fluence value of 795 mJ/mm2 was optimal. The


responsivity (Rλ), specific detectivity (Dλ), and external quantum efficiency (EQE) of the produced GaN nano-crystalline film were assessed. Responsivity (Rλ) can be calculated using Eq. 


(4)57,96,100,101, which stands as a significant figure of merit. Both Eqs. (5) and (6)102,103,104,105 represent detectivity (D*) and external quantum efficiency (EQE), respectively $$


{\text{R}}_{{\uplambda }} = \frac{{{\text{I}}_{{{\text{ph}}}} }}{{\text{P}}} $$ (4) Iph is the photocurrent (Ampere), and P is the incident power (Watt)106,107. $$ {\text{D}}_{{\uplambda


}}^{*} = \frac{{{\text{R}}_{{\uplambda }} {\text{A}}^{1/2} }}{{\sqrt {2{\text{qI}}_{{{\text{dark}}}} } }} $$ (5) where A is the area of photodetector, \({\mathrm{I}}_{\mathrm{dark}}\) is the


dark current of photodetector, and q is the electron charge108,109,110,111. $$ {\text{EQE}} = \frac{{1240{\text{ R}}_{{\uplambda }} }}{{\lambda_{nm} }} $$ (6) Figure 14 depicts the


responsivity of the structure when subjected to varying laser intensities operating between 350 and 850 nm. Three response peaks of 29.010 A/W at 370 nm and 22.761 A/W at 550 nm were


observed in the fabricated GaN on P-Si nanostructure at 795 mJ/mm2, which can be attributed to the larger surface area, extended depletion layer width, and increased minority carrier


diffusion length112. Figure 15 depicts variation of detectivity (D*) with wavelength of the GaN/P-Si photodetectors. Two peaks were observed at 355 nm and 550 nm. Figure 16 depicts the EQE


of GaN/PSi photodetectors fabricated at various laser fluences. Among these, the photodetector fabricated at 795 mJ/mm2 achieved the highest EQE values: 93.240% at 370 nm and 51.30% at 550 


nm. The GaN/PSi heterojunction photodetector fabricated at 795 mJ/mm2 demonstrated a high EQE due to the direct relationship with Eq. (6), driven by its strong spectral response. Enhancing


the reverse bias voltage can improve the collection efficiency of photogenerated carriers, allowing for the creation of a fully depleted photodetector113,114. Figures 17 and 18 depict the


dynamic photoresponse switching of the photodetectors deposited at various laser fluences. Three distinct switching cycles were conducted, each with an 18-s off period followed by a 25-s on


period. Rise and fall times of the fabricated GaN/P-Si nanostructure were measured from 10 to 90% of the peak signal and from 90 to 10% of the peak signal, respectively. The photodetector


prepared with a laser fluence of 795 mJ/mm2 exhibits a switching characteristic, with a measured rise time of 363 μs and a fall time of 711 μs. The fabricated GaN/P-Si nanocrystalline film


at 795 mJ/mm2 exhibited the best performance, with a responsivity of 29.010 A/W at 370 nm, a detectivity of 8.61 × 1012 Jones, and an external quantum efficiency of 93.240%. Additionally, it


demonstrated a fast response rise time of 328 and a fall time of 617, outperforming Jiang et al. (2022), who fabricated a GaN/Si UV photodetector using a chemical vapor deposition process.


Their device showed a responsivity of 71.4 mA/W, detectivity of 7.1 × 108 Jones, external quantum efficiency of 24.3%, and a response time of 0.2/7.6 s115. Table 5 provides a summary of the


figures of merit for the GaN/PSi photodetectors fabricated at various laser fluences. CONCLUSION Nanostructured GaN/PSi photodetectors were successfully fabricated using the pulsed laser


deposition method at various laser fluences. The GaN nanostructure film deposited at 795 mJ/mm2 exhibited high crystalline peaks with a large crystallite size, indicating favorable


structural characteristics. Spectroscopically, this film exhibited a shorter wavelength of 260 nm and a high energy gap of 4.76 eV. Morphologically, the film showed uniform, homogeneous


spherical particles resembling cauliflower, with a thickness of 383.36 nm. Additionally, a uniform deposition yielded the largest average particle diameter (178.8 nm) and average surface


roughness (50.61 nm). Furthermore, performance characteristics were assessed for GaN nanostructures prepared using a laser fluence of 795 mJ/mm2. Due to the energy gap of GaN material, the


responsivity under 3 V exhibited maximum values: responsivity of approximately 29.03 A/W, detectivity of 8.6 × 1012 Jones, and an external quantum efficiency of 97.2% at 370 nm. Similarly,


at 575 nm, the responsivity measured around 19.86 A/W, detectivity of 8.9 × 1012 Jones, and an external quantum efficiency of 50.89%. Additionally, three switching cycles with an 18-s off


period and a 25-s on period were illuminated with a power of 100 mW/cm2. The rise time of the fabricated GaN/P-Si nanostructure was 328 μs, while the fall time was 617 μs. A strong


correlation was observed between the optimum laser Fluence (795 mJ/mm2) and the achieved GaN nanostructure performance characteristics. DATA AVAILABILITY Correspondence and requests for


materials should be addressed to Makram A. Fakhri, Haneen D. Jabbar, and Evan T. Salim. REFERENCES * Chen, F., Ji, X. & Lau, S. P. Recent progress in group III-nitride nanostructures:


From materials to applications. _Mater. Sci. Eng. R. Rep._ 142, 100578 (2020). Article  Google Scholar  * Feng, Z. C. (ed.) _III-Nitride Materials_ (World Scientific, 2017). Google Scholar 


* Gil, B. _III-Nitride Semiconductors and Their Modern Devices_ (OUP Oxford, 2013). Book  Google Scholar  * Kneissl, M. & Rass, J. _III-Nitride Ultraviolet Emitters_ (Springer, 2016).


Book  Google Scholar  * Ben, J. _et al._ 2D III-Nitride materials: Properties, growth, and applications. _Adv. Mater._ 33(27), 2006761 (2021). Article  CAS  Google Scholar  * Flack, T. J.,


Pushpakaran, B. N. & Bayne, S. B. GaN technology for power electronic applications: A review. _J. Electron. Mater._ 45(6), 2673–2682 (2016). Article  ADS  CAS  Google Scholar  * Boles,


T. (GaN-on-silicon present challenges and future opportunities. In _2017 12th European Microwave Integrated Circuits Conference (EuMIC)_ 21–24 (IEEE, 2017). * Amir, H. A. A. A. _et al._


Synthesis of gallium nitride nanostructure using pulsed laser ablation in liquid for photoelectric detector. _Mater. Sci. Semicond. Process._ 150, 106911 (2022). Article  Google Scholar  *


Abud, S. H., Selman, A. M. & Hassan, Z. Investigation of structural and optical properties of GaN on flat and porous silicon. _Superlattices Microstruct._ 97, 586–590 (2016). Article 


ADS  CAS  Google Scholar  * Jabbar, H. D., Fakhri, M. A. & AbdulRazzaq, M. J. Gallium nitride-based photodiode: A review. _Mater. Today: Proc._ 42, 2829–2834 (2021). CAS  Google Scholar


  * Roccaforte, F., Fiorenza, P., Lo Nigro, R., Giannazzo, F. & Greco, G. Physics and technology of gallium nitride materials for power electronics. _La Riv. Nuovo Cimen._ 41(12),


625–681 (2018). ADS  CAS  Google Scholar  * Al-Zuhairi, O. _et al._ Non-polar gallium nitride for photodetection applications: A systematic review. _Coatings_ 12(2), 275 (2022). Article  CAS


  Google Scholar  * Amir, H. A. A. A., Fakhri, M. A., Alwahib, A. A. & Salim, E. T. Synthesize of GaN/quartz nanostructure using pulsed laser ablation in liquid for optoelectronic


devices. _Sens. Actuat. B: Chem._ 2021, 2163 (2021). Google Scholar  * Amir, H. A. A. A. _et al._ An investigation on GaN/Porous-Si NO2 gas sensor fabricated by pulsed laser ablation in


liquid. _Sens. Actuat. B: Chem._ 2022, 132163 (2022). Article  Google Scholar  * Aggarwal, N. & Gupta, G. Enlightening gallium nitride-based UV photodetectors. _J. Mater. Chem. C_ 8(36),


12348–12354 (2020). Article  CAS  Google Scholar  * Xu, W. _et al._ Magnesium ion-implantation-based gallium nitride pin photodiode for visible-blind ultraviolet detection. _Photon. Res._


7(8), B48–B54 (2019). Article  CAS  Google Scholar  * Pham, T. T. T., Shin, H., Chong, E. & Cha, H. Y. Gallium nitride PIN avalanche photodiode with double-step mesa structure. _J.


Semicond. Technol. Sci._ 18(5), 645–649 (2018). Article  Google Scholar  * Yakuphanoglu, F. _et al._ A new type photodiode: p-Si/GaN pn junction in series with GaN/Ag Schottky diode. _J.


Alloy. Compd._ 650, 671–675 (2015). Article  CAS  Google Scholar  * Ji, M. H. _et al._ Uniform and reliable GaN pin ultraviolet avalanche photodiode arrays. _IEEE Photon. Technol. Lett._


28(19), 2015–2018 (2016). Article  ADS  CAS  Google Scholar  * Bakhtiary-Noodeh, M. _et al_. Demonstration of uniform 6x6 GaN pin UV avalanche photodiode arrays. In _Gallium Nitride


Materials and Devices XVI, vol. 11686_ 93–100 (SPIE, 2021). * Griffiths, A. D., Herrnsdorf, J., McKendry, J. J. D., Strain, M. J. & Dawson, M. D. Gallium nitride micro-light-emitting


diode structured light sources for multi-modal optical wireless communications systems. _Philos. Trans. R. Soc. A_ 378(2169), 20190185 (2020). Article  ADS  CAS  Google Scholar  * Wang, Y.


_et al._ A monolithically integrated gallium nitride nanowire/silicon solar cell photocathode for selective carbon dioxide reduction to methane. _Chem. Eur. J._ 22(26), 8809–8813 (2016).


Article  CAS  PubMed  Google Scholar  * Zulkifli, N. A. A. _et al._ A highly sensitive, large area, and self-powered UV photodetector based on coalesced gallium nitride


nanorods/graphene/silicon (111) heterostructure. _Appl. Phys. Lett._ 117(19), 191103 (2020). Article  ADS  CAS  Google Scholar  * Li, G., Wang, W., Yang, W. & Wang, H. Epitaxial growth


of group III-nitride films by pulsed laser deposition and their use in the development of LED devices. _Surf. Sci. Rep._ 70(3), 380–423 (2015). Article  ADS  CAS  Google Scholar  * Wong, S.


& Jaluria, Y. A numerical and experimental study on the fabrication GaN films by chemical vapor deposition. _J. Manuf. Sci. Eng._ 142(1), 011001 (2020). Article  Google Scholar  * Wang,


W., Wang, H., Yang, W., Zhu, Y. & Li, G. A new approach to epitaxially grow high-quality GaN films on Si substrates: The combination of MBE and PLD. _Sci. Rep._ 6(1), 1–11 (2016). Google


Scholar  * Shetty, A. _et al_. (Plasmonic enhancement of photocurrent in GaN based UV photodetectors. In _2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)_ 1–4 (IEEE,


2014). * Salim, E. T., Hassan, A. I. & Naaes, S. A. Effect of gate dielectric thicknesses on MOS photodiode performance and electrical properties. _Mater. Res. Express_ 6(8), 086416


(2019). Article  ADS  CAS  Google Scholar  * Lin, J. C. _et al._ High responsivity of GaN p-i-n photodiode by using low-temperature interlayer. _Appl. Phys. Lett._ 91(17), 173502 (2007).


Article  ADS  Google Scholar  * ElFaham, M. M., Mostafa, A. M. & Toghan, A. Facile synthesis of Cu2O nanoparticles using pulsed laser ablation method for optoelectronic applications.


_Colloids Surf. A_ 630, 127562 (2021). Article  CAS  Google Scholar  * Tareq, H. S. Deposited nanostructure cds thin film by using pulse laser deposition technique for fabrication of


heterojunction solar cell. _Eng. Tech. J._ 32, 141 (2014). Google Scholar  * Abdulkareem, K. A., Kadhim, S. M. & Ali, S. B. The structural and optical properties of nanocrystalline Fe3O4


thin films prepared by PLD. _Eng. Technol. J._ 40(02), 334–342 (2022). Article  Google Scholar  * Abdul Amir, H. A. A., Fakhri, M. A. & Alwahib, A. Synthesized of GaN nanostructure


using 1064 nm laser wavelength by pulsed laser ablation in liquid. _Eng. Technol. J._ 40(2), 404–411 (2022). Article  Google Scholar  * Taleb, S. M., Fakhri, M. A., & Adnan, S. A.


Optical investigations of nanophotonic LiNbO3 films deposited by pulsed laser deposition method. In _Defect and Diffusion Forum, vol. 398_ 16–22 (Trans Tech Publications Ltd, 2020). *


Khalid, F. G., Ibraheam, A. S., Fakhri, M. A., & Numan, N. H. Some of the electrical and thermoelectrical properties for Cdo thin films preperaerd using pulsed laser deposition method.


In _AIP Conference Proceedings, vol. 2213_ 020204 (AIP Publishing LLC, 2020). * Fakhri, M. A. _et al._ Synthesis of LiNbO3/SiO2/Si nanostructures layer by layer based on mach-zehnder


modulator using pulsed laser deposition route. _Silicon_ 2022, 1–15 (2022). Google Scholar  * Chidambaram, P. R., Bowen, C., Chakravarthi, S., Machala, C. & Wise, R. Fundamentals of


silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing. _IEEE Trans. Electron. Dev._ 53(5), 944–964 (2006). Article  ADS  CAS  Google


Scholar  * Basu, S. (Ed.). _Crystalline Silicon: Properties and Uses_. (BoD–Books on Demand, 2011). * Sun, P., Xu, P., Zhu, K., & Zhou, Z. Silicon-based optoelectronics enhanced by


hybrid plasmon polaritons: Bridging dielectric photonics and nanoplasmonics. In _Photonics, vol. 8_ 482. MDPI (2021). * Sharma, P., Sun, X., Parish, G. & Keating, A. Optimising porous


silicon electrical properties for thermal sensing applications. _Micropor. Mesopor. Mater._ 312, 110767 (2021). Article  CAS  Google Scholar  * Vercauteren, R., Scheen, G., Raskin, J. P.


& Francis, L. A. Porous silicon membranes and their applications: Recent advances. _Sens. Actuat. A_ 318, 112486 (2021). Article  CAS  Google Scholar  * Jung, Y., Huh, Y. & Kim, D.


Recent advances in surface engineering of porous silicon nanomaterials for biomedical applications. _Micropor. Mesopor. Mater._ 310, 110673 (2021). Article  CAS  Google Scholar  * Moretta,


R., De Stefano, L., Terracciano, M. & Rea, I. Porous silicon optical devices: Recent advances in biosensing applications. _Sensors_ 21(4), 1336 (2021). Article  ADS  CAS  PubMed  PubMed


Central  Google Scholar  * Jenie, S. N., Plush, S. E. & Voelcker, N. H. Recent advances on luminescent enhancement-based porous silicon biosensors. _Pharmaceut. Res._ 33(10), 2314–2336


(2016). Article  CAS  Google Scholar  * Congli, S. _et al._ Synthesis of porous silicon nano-wires and the emission of red luminescence. _Appl. Surface Sci._ 282, 259–263 (2013). Article 


ADS  Google Scholar  * Arshavsky-Graham, S., Massad-Ivanir, N., Segal, E. & Weiss, S. Porous silicon-based photonic biosensors: Current status and emerging applications. _Anal. Chem._


91(1), 441–467 (2018). Article  PubMed  Google Scholar  * Canham, L. (ed.) _Handbook of Porous Silicon_ 163–170 (Springer International Publishing, 2014). Book  Google Scholar  * Kim, D. H.,


Lee, W. & Myoung, J. M. Flexible multi-wavelength photodetector based on porous silicon nanowires. _Nanoscale_ 10(37), 17705–17711 (2018). Article  CAS  PubMed  Google Scholar  *


Ismail, R. A., Alwan, A. M. & Ahmed, A. S. Preparation and characteristics study of nano-porous silicon UV photodetector. _Appl. Nanosci._ 7(1), 9–15 (2017). Article  ADS  CAS  Google


Scholar  * Santos, H. A., Mäkilä, E., Airaksinen, A. J., Bimbo, L. M. & Hirvonen, J. Porous silicon nanoparticles for nanomedicine: Preparation and biomedical applications.


_Nanomedicine_ 9(4), 535–554 (2014). Article  CAS  PubMed  Google Scholar  * Jabbar, H. D. _et al._ Effect of different etching time on fabrication of an optoelectronic device based on


GaN/Psi. _J. Renew. Mater._ 11(3), 1101–1122 (2023). Article  CAS  Google Scholar  * Jabbar, H. D., Fakhri, M. A. & AbdulRazzaq, M. J. Synthesis gallium nitride on porous silicon


nano-structure for optoelectronics devices. _Silicon_ 2022, 1–17 (2022). Google Scholar  * Hattab, F. & Fakhry, M. Optical and structure properties for nano titanium oxide thin film


prepared by PLD. In _2012 First National Conference for Engineering Sciences (FNCES 2012)_. https://doi.org/10.1109/NCES.2012.6740474. * Asady, H., Salim, E. T. & Ismail, R. A. Some


critical issues on the structural properties of Nb2O5 nanostructure film deposited by hydrothermal technique. _AIP Conf. Proc._ 2213(1), 020183 (2020). Article  CAS  Google Scholar  *


Fakhri, M. A., Al-Douri, Y. & Hashim, U. Fabricated optical strip waveguide of nanophotonics lithium niobate. _IEEE Photon. J._ 8(2), 4500410. https://doi.org/10.1109/JPHOT.2016.2531583


(2016). Article  CAS  Google Scholar  * Mohammed, F. A., Salim, E. T., Hassan, A. I. & Wahid, M. H. A. Effect of precursor concentration on the structural, optical, and electrical


properties of WO3 thin films prepared by spray pyrolysis. _J. Appl. Sci. Nanotechnol._ 2(4), 91–105 (2022). Article  Google Scholar  * Fakhri, M. A. _et al._ Responsivity and response time


of nano silver oxide on silicon heterojunction detector. _Int. J. Nanoelectron. Mater._ 11(21), 65–72 (2018). Google Scholar  * Alwazny, M. S., Ismail, R. A. & Salim, E. T. Optical


properties of lithium niobate nanoparticles prepared by laser ablation in different surfactant solutions. _J. Appl. Sci. Nanotechnol._ 3(1), 42–50 (2023). Article  Google Scholar  *


Mohammed, D. A., Kadhim, A. & Fakhri, M. A. The enhancement of the corrosion protection of 304 stainless steel using Al2O3films by PLD method. _AIP Conf. Proc._ 2045, 020014.


https://doi.org/10.1063/1.5080827 (2018). Article  CAS  Google Scholar  * Ismail, R. A., Yehya, K. Z. & Abdulrazaq, O. A. Preparation and characterization of In2O3 thin films for


optoelectronic applications. _Surface Rev. Lett._ 12, 515–518 (2005). Article  ADS  CAS  Google Scholar  * Fakhri, M. A. _et al._ Fabrication of UV photodetector based on GaN/Psi


heterojunction using pulse laser deposition method: Effect of different laser wavelengths. _Opt. Mater._ 137, 113593 (2023). Article  CAS  Google Scholar  * Salim, E. T., Agool, I. R. &


Muhsien, M. A. Construction of SnO2/SiO2/Si heterojunction and its lineup using I-V and C-V measurements. _Int. J. Modern Phys. B_ 25(29), 3863–3869 (2011). Article  ADS  Google Scholar  *


Salim, S. H., Al-Anbari, R. H. & Haider, A. Polysulfone/TiO2 thin film nanocomposite for commercial ultrafiltration membranes. _J. Appl. Sci. Nanotechnol._ 2(1), 80–89 (2022). Article 


Google Scholar  * Abdulrazzaq, O. A. & Saleem, E. T. Inexpensive near-IR photodetector. _Turk. J. Phys._ 30, 35–39 (2006). Google Scholar  * Fakhri, M. A. _et al._ Structural properties


and surface morphology analysis of nanophotonic LINBO3. _ARPN J. Eng. Appl. Sci._ 11(8), 4974–4978 (2016). CAS  Google Scholar  * Salim, E. T. Rapid thermal oxidation for silicon nanocrystal


based solar cell. _Int. J. Nanoelectron. Mater._ 5(2), 95–100 (2012). Google Scholar  * Omar, K. & Salman, K. A. Effects of electrochemical etching time on the performance of porous


silicon solar cells on crystalline n-type (100) and (111). _J. Nano Res._ 46, 45–56 (2017). Article  CAS  Google Scholar  * Salim, E. T. Optoelectronic properties of Fe2O3/Si heterojunction


prepared by rapid thermal oxidation method. _Indian J. Phys._ 87(4), 349–353. https://doi.org/10.1007/s12648-012-0229-5 (2013). Article  ADS  CAS  Google Scholar  * Fakhri, M. A., Hashim,


U., Salim, E. T. & Salim, Z. T. Preparation and charactrization of photonic LiNbO3generated from mixing of new raw materials using spry pyrolysis method. _J. Mater. Sci. Mater.


Electron._ 27(12), 13105–13112. https://doi.org/10.1007/s10854-016-5455-8 (2016). Article  CAS  Google Scholar  * Salim, E. T., Al-Wazny, M. S. & Fakhri, M. A. Glancing angle reactive


pulsed laser deposition (GRPLD) for Bi 2O3/Si heterostructure. _Modern Phys. Lett. B_ 27(16), 1350122. https://doi.org/10.1142/S0217984913501224 (2013). Article  ADS  CAS  Google Scholar  *


Kang, B. K. _et al._ Formation of highly efficient dye-sensitized solar cells by effective electron injection with GaN nanoparticles. _J. Electrochem. Soc._ 158(7), H693 (2011). Article  CAS


  Google Scholar  * Salim, E. T., Fakhri, M. A. & Hassen, H. Metal oxide nanoparticles suspension for optoelectronic devises fabrication. _Int. J. Nanoelectron. Mater._ 6(2), 121–128


(2013). Google Scholar  * Fakhri, M. A. _et al._ Optical investigation of nanophotonic lithium niobate-based optical waveguide. _Appl. Phys. B: Lasers Opt._ 121(1), 107–116.


https://doi.org/10.1007/s00340-015-6206-x (2015). Article  ADS  CAS  Google Scholar  * Abdul-Muhsien, M., Salim, E. T., Al-Douri, Y., Sale, A. F. & Agool, I. R. Synthesis of SnO2 


nanostructures employing Nd:YAG laser. _Appl. Phys. A_ 120(2), 725–730. https://doi.org/10.1007/s00339-015-9249-2 (2015). Article  ADS  CAS  Google Scholar  * Koch, C. C., Ovid’Ko, I. A.,


Seal, S. & Veprek, S. _Structural Nanocrystalline Materials: Fundamentals and Applications_ (Cambridge University Press, 2007). Book  Google Scholar  * Salim, E. T., Al-Douri, Y.,


Al-Wazny, M. S. & Fakhri, M. A. Optical properties of Cauliflower-like Bi2O3nanostructures by reactive pulsed laser deposition (PLD) technique. _Solar Energy_ 107, 523–529.


https://doi.org/10.1016/j.solener.2014.05.020 (2014). Article  ADS  CAS  Google Scholar  * Swanson, W. E. _Tables for Conversion of X-ray Diffraction Angles to In-terplanar Spacing_


(National Bureau of Standards, 1960). * Wang, T. _et al._ Structure and photoluminescence properties of the quasi-regular arrangements of porous silicon. _Optoelectron. Adv. Mater.-Rapid


Commun._ 5(2011), 495–498 (2011). CAS  Google Scholar  * Salim, Z. T., Hashim, U., Arshad, M. K. M., Fakhri, M. A. & Salim, E. T. Zinc oxide flakes-corolla lobes like nano combined


structure for SAW applications. _Mater. Res. Bull._ 86, 215–219. https://doi.org/10.1016/j.materresbull.2016.11.015 (2017). Article  CAS  Google Scholar  * Fakhri, M. A. _et al._ Synthesis


and characterization of nanostructured LiNbO3 films with variation of stirring duration. _J. Mater. Sci.: Mater. Electron._ 28(16), 11813–11822. https://doi.org/10.1007/s10854-017-6989-0


(2017). Article  CAS  Google Scholar  * Hassanien, A. S. & Akl, A. A. Effect of Se addition on optical and electrical properties of chalcogenide CdSSe thin films. _Superlatt.


Microstruct.s_ 89, 153–169 (2016). Article  ADS  CAS  Google Scholar  * Saxena, S. K. _et al._ Effect of silicon resistivity on its porosification using metal induced chemical etching:


Morphology and photoluminescence studies. _Mater. Res. Express_ 2(3), 036501 (2015). Article  ADS  Google Scholar  * Salim, Z. T., Hashim, U., Arshad, M. KMd., Fakhri, M. A. & Salim, E.


T. Frequency-based detection of female Aedes mosquito using surface acoustic wave technology: Early prevention of dengue fever. _Microelectron. Eng._ 179, 83–90.


https://doi.org/10.1016/j.mee.2017.04.016 (2017). Article  CAS  Google Scholar  * Salim, E. T., Saimon, J. A., Abood, M. K. & Fakhri, M. A. Some physical properties of Nb2O5 thin films


prepared using nobic acid based colloidal suspension at room temperature. _Mater. Res. Express_ 4(10), 106407. https://doi.org/10.1088/2053-1591/aa90a6 (2017). Article  ADS  CAS  Google


Scholar  * Fakhri, M. A. _et al._ Enhancement of Lithium Niobate nanophotonic structures via spin-coating technique for optical waveguides application. _Eur. Phys. J. Conf._ 162(7), 01004.


https://doi.org/10.1051/epjconf/201716201004 (2017). Article  CAS  Google Scholar  * Sultan, F. I., Slman, A. A. & Nayef, U. M. IV and CV characteristics of porous silicon nanostructures


by electrochemical etching. _Eng. Technol. J._ 31(3), 154 (2013). Google Scholar  * Ismail, R. A., Habubi, N. F. & Abbod, M. M. Preparation of high-sensitivity In2S3/Si heterojunction


photodetector by chemical spray pyrolysis. _Opt. Quant. Electron._ 48, 1–14 (2016). Article  Google Scholar  * Fakhri, M. A., Al-Douri, Y., Bouhemadou, A. & Ameri, M. Structural and


optical properties of nanophotonic LiNbO3 under stirrer time effect. _J. Opt. Commun._ 39(3), 297–306. https://doi.org/10.1515/joc-2016-0159 (2017). Article  Google Scholar  * Abood, M. K.,


Salim, E. T. & Saimon, J. A. Impact of substrate type on the microstructure of H-Nb2o5 thin film at room temperature. _Int. J. Nanoelectron. Mater._ 11(21), 55–64 (2018). Google Scholar


  * Pujadó, M. P. _Carbon Nanotubes as Platforms for Biosensors with Electrochemical and Electronic Transduction_ (Springer Science & Business Media, 2012). Book  Google Scholar  *


Hattab, F. & Fakhry, M. Optical and structure properties for nano titanium oxide thin film prepared by PLD. In _2012 1st Natl. Conf. Eng. Sci. FNCES 2012_, no. 6000 7–11 (2012).


https://doi.org/10.1109/NCES.2012.6740474. * Abd, A. N., Habubi, N. F., Reshak, A. H. & Mansour, H. L. Enhancing the electrical properties of porous silicon photodetector by depositing


MWCNTs. _Int. J. Nanoelectron. Mater._ 11, 3 (2018). Google Scholar  * Abood, M. K., Wahid, M. H. A., Saimon, J. A. & Salim, E. T. Physical properties of Nb2O5 thin films prepared at 12M


ammonium concentration. _Int. J. Nanoelectron. Mater._ 11, 237–244 (2018). Google Scholar  * Hassan, M. A. M., Al-Kadhemy, M. F. H. & Salem, E. T. Effect irradiation time of Gamma ray


on MSISM (Au/SnO2/SiO2/Si/Al) devices using theoretical modeling. _Int. J. Nanoelectron. Mater._ 8(2), 69–82 (2014). Google Scholar  * Fakhri, M. A. _et al._ Responsivity and response time


of nano silver oxide on silicon heterojunction detector. _Int. J. Nanoelectron. Mater._ 11, 109–114 (2018). Google Scholar  * Abood, M. K., Wahid, M. H. A., Salim, E. T. & Saimon, J. A.


Niobium pentoxide thin films employ simple colloidal suspension at low preparation temperature. _EPJ Web Conf._ 162, 01508. https://doi.org/10.1051/epjconf/201716201058 (2017). Article  CAS


  Google Scholar  * Ismail, R. A., Hasan, N. & Shaker, S. S. Preparation of Bi2Sr2CaCu2Ox thin film by pulsed laser deposition for optoelectronic devices application. _Silicon_ 14,


2625–2633 (2022). Article  CAS  Google Scholar  * Agool, I. R., Salim, E. T. & Muhsien, M. A. Optical and electrical properties of SnO2thin film prepared using RTO method. _Int. J.


Modern Phys. B_ 25(8), 1081–1089 (2011). Article  ADS  CAS  Google Scholar  * Fakhri, M. A. _et al._ Enhancement of lithium niobate nanophotonic structures via spin-coating technique for


optical waveguides application. _EPJ Web Conf._ 162, 01004. https://doi.org/10.1051/epjconf/201716201004 (2017). Article  CAS  Google Scholar  * Halboos, H. T. & Salim, E. T. Silver


doped niobium pentoxide nanostructured thin film, optical structural and morphological properties. _IOP Conf. Ser. Mater. Sci. Eng._ 454(1), 012174.


https://doi.org/10.1088/1757-899X/454/1/012174 (2018). Article  Google Scholar  * Narang, K. _et al._ Improvement in surface morphology and 2DEG properties of AlGaN/GaN HEMT. _J. Alloys


Compd._ 815, 152283 (2020). Article  CAS  Google Scholar  * Taha, J. M., Nassif, R. A., Numan, N. H. & Fakhri, M. A. Effects of oxygen gas on the physical properties of tin oxide nano


films using laser light as ablation source. _AIP Conf. Proc._ 2213, 144. https://doi.org/10.1063/5.0000198 (2020). Article  CAS  Google Scholar  * Yang, C. _et al._ High breakdown voltage


and low dynamic ON-resistance AlGaN/GaN HEMT with fluorine ion implantation in SiNx passivation layer. _Nanoscale Res. Lett._ 14(1), 1–6 (2019). Article  ADS  Google Scholar  * Salim, E. T.,


Ismail, R. A. & Halbos, H. T. Deposition geometry effect on structural, morphological and optical properties of Nb2O5 nanostructure prepared by hydrothermal technique. _Appl. Phys. A_


126(11), 891 (2020). Article  ADS  CAS  Google Scholar  * Al-Wazny, M. S., Salim, E. T., Bader, B. A. & Fakhry, M. A. Synthesis of Bi2O3 films, studying their optical, structural, and


surface roughness properties. _IOP Conf. Ser. Mater. Sci. Eng._ 454(1), 012160. https://doi.org/10.1088/1757-899X/454/1/012160 (2018). Article  Google Scholar  * Ismail, R. A. “Fabrication


and characterization of photodetector based on porous silicon. _e-J. Surf. Sci. Nanotechnol._ 8, 388–391 (2010). Article  CAS  Google Scholar  * Hamd, S. S., Ramizy, A. & Ismail, R. A.


Preparation of novel B4C nanostructure/Si photodetectors by laser ablation in liquid. _Sci. Rep._ 12(1), 1–15 (2022). Article  Google Scholar  * Fakhri, M. A. _et al._ Efficiency enhancement


of optical strip waveguide by the effect of heat treatment. _Optik_ 180, 768–774. https://doi.org/10.1016/j.ijleo.2018.12.006 (2019). Article  ADS  CAS  Google Scholar  * Hattab, F. A.


& Hamed, E. K. Laser energy effects on optical properties of titanium di-oxide prepared by reactive pulsed laser deposition. _Eng. Tech. J._ 30(1), 3104–3111 (2012). Google Scholar  *


Salim, E. T., Saimon, J. A., Abood, M. K. & Fakhri, M. A. Electrical conductivity inversion for Nb2O5 nanostructure thin films at different temperatures. _Mater. Res. Express_ 6(12),


126459. https://doi.org/10.1088/2053-1591/ab771c (2019). Article  CAS  Google Scholar  * Ismail, R. A., Rawdhan, H. A. & Ahmed, D. S. High-responsivity hybrid α-Ag2S/Si photodetector


prepared by pulsed laser ablation in liquid. _Beilstein J. Nanotechnol._ 11(1), 1596–1607 (2020). Article  CAS  PubMed  PubMed Central  Google Scholar  * Fakhri, M. A., Abdulwahhab, A. W.,


Kadhim, S. M., Alwazni, M. S. & Adnan, S. A. Thermal oxidation effects on physical properties of CuO2 thin films for optoelectronic application. _Mater. Res. Express_ 6(2), 026429


(2018). Article  ADS  Google Scholar  * Salim, E. T. _et al._ Effect of light induced heat treatment on the structural and morphological properties of LiNbO3 thin films. _Super Lattices


Microstruct._ 128, 67–75. https://doi.org/10.1016/j.spmi.2019.01.016 (2019). Article  ADS  CAS  Google Scholar  * Fakhri, M. A. _et al._ The effect of annealing temperature on optical and


photolumence proper. _Surface Rev. Lett._ 26(10), 1950068. https://doi.org/10.1142/S0218625X19500689 (2019). Article  ADS  CAS  Google Scholar  * Jiang, H. H. _et al._ GaN MSM structure UV


photodetector detector based on nonplanar Si substrate and its performance optimization. _Semicond. Sci. Technol._ 37(10), 105020 (2022). Article  ADS  Google Scholar  Download references


ACKNOWLEDGEMENTS The authors would like to thank the University of Technology-Iraq for the logistic support this work. The authors extend their appreciation to the Deanship of Scientific


Research at Northern Border University, Arar, KSA for support this research work through the project number “NBU-FFR-2023-0139. The authors gratefully thank the Prince Faisal bin Khalid bin


Sultan Research Chair in Renewable Energy Studies and Applications (PFCRE) at Northern Border University for their support and assistance. The authors would like to thank Al-Farahidi


University, Baghdad, Iraq for the logistic support this work. AUTHOR INFORMATION AUTHORS AND AFFILIATIONS * Laser and Optoelectronic Department, University of Technology-Iraq, Baghdad, Iraq


Makram A. Fakhri, Haneen D. Jabbar & Mohammed Jalal AbdulRazzaq * Applied Science Department, University of Technology-Iraq, Baghdad, Iraq Evan T. Salim & Raid A. Ismail * Electrical


Engineering Department, Northern Border University, Arar, Kingdom of Saudi Arabia Ahmad S. Azzahrani * AlFarahidi University, Baghdad, Iraq Raed Khalid Ibrahim Authors * Makram A. Fakhri


View author publications You can also search for this author inPubMed Google Scholar * Haneen D. Jabbar View author publications You can also search for this author inPubMed Google Scholar *


Mohammed Jalal AbdulRazzaq View author publications You can also search for this author inPubMed Google Scholar * Evan T. Salim View author publications You can also search for this author


inPubMed Google Scholar * Ahmad S. Azzahrani View author publications You can also search for this author inPubMed Google Scholar * Raed Khalid Ibrahim View author publications You can also


search for this author inPubMed Google Scholar * Raid A. Ismail View author publications You can also search for this author inPubMed Google Scholar CONTRIBUTIONS M.A.F., H.D.J., M.J.A.,


E.T.S., A.S.A., R.K.I., R.A.I., conceptualization, M.A.F., H.D.J., M.J.A., E.T.S; methodology, M.A.F., H.D.J., M.J.A., E.T.S; validation, M.A F., E.T.S., A.S.A., R.K.I., R.A.I.; formal


analysis, M.A.F., H.D.J., M.J.A., E.T.S.; investigation, M.A.F., H.D.J., E.T.S., A.S.A., R.K.I., R.A.I.; resources, M.A.F., E.T.S., A.S.A., R.K.I., R.A.I.; data curation, M.A.F., H.D.J.,


E.T.S.; writing—original draft preparation, H.D.J.; writing—review and editing, M.A.F., M.J.A., E.T.S., A.S.A., R.K.I., R.A.I.; visualization, M.A.F., H.D.J., M.J.A., E.T.S., A.S.A., R.K.I.,


R.A.I.; supervision, M.A.F., M.J.A.; project administration, M.A.F., M.J.A., E.T.S.; funding acquisition, A.S.A., all authors have read and agreed to the published version of the


manuscript. CORRESPONDING AUTHORS Correspondence to Makram A. Fakhri, Evan T. Salim or Ahmad S. Azzahrani. ETHICS DECLARATIONS COMPETING INTERESTS The authors declare no competing interests.


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M.A., Jabbar, H.D., AbdulRazzaq, M.J. _et al._ Effect of laser fluence on the optoelectronic properties of nanostructured GaN/porous silicon prepared by pulsed laser deposition. _Sci Rep_


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